The Ultimate Guide To Noohapou
The Ultimate Guide To Noohapou
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Remote spots: Static models are generally located remotely, rising Value and decreasing In general process efficiency.
30% of its peak electricity intake, giving our clients sizeable reduction in functioning expenditures and enhanced reliability.
Using the POU3500, you could reach unparalleled brings about etch performance, chamber uptime, lessened price of ownership and fab space utilization – all whilst enhancing your system dependability.
Originally founded in 1985, our organization has grown into a acknowledged chief in offering temperature control devices to the global semiconductor marketplace.
LAUDA-Noah will, for just a shopper's retrofit analysis, keep track of and modify its fluid temperature Command profiles to match an present TCUs' as a way to guarantee a easy course of action integration by means of DAQ.
The precision of your POU 3300 Noohapou allows for unbiased Charge of the process fluid temperature for the wafer chuck within +/- 0.one °C of set level, and also the speedy reaction time on the process lets for optimum wafer-to-wafer repeatability through the etch method.
All static TCUs involve surplus cooling & heating capacities because of their really substantial process fluid reservoirs. the method fuid reservoir on LAUDA-Noah's dynamic temperature Management method is less than one gallon.
Along with the POU3300, you are able to obtain unprecedented leads to etch efficiency, chamber uptime, lessened expense of ownership and fab Room utilization – all though increasing your process reliability.
huge Footprint: Static units occupy considerable space throughout the fabrication Resource spot, minimizing its performance.
LAUDA-Noah is Assembly these new worries and has incorporated Electricity preserving technology in methods that are pleasant into the natural environment and also have a low cost to work.
the information established here is from a 200mm quantity creation wafer fab and Obviously illustrates the good thing about the LAUDA-Noah POU technique.
greater than at any time, shrinking system geometries, demanding new processes and also a remarkably competitive natural environment demand temperature Command units that combine quickly and correct temperature control with the emphasis on decreased functioning expenses and improved trustworthiness.
the fact is that genuine Dynamic Temperature Manage can only be achieved when all five (five) of the next technique layout and set up demands are fulfilled:
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We have to have a lot less cooling/heating capacity for a similar software like a static TCU as a consequence of our small reservoir quantity.
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